JPH069489Y2 - ウエハ支持具の載置台 - Google Patents

ウエハ支持具の載置台

Info

Publication number
JPH069489Y2
JPH069489Y2 JP763588U JP763588U JPH069489Y2 JP H069489 Y2 JPH069489 Y2 JP H069489Y2 JP 763588 U JP763588 U JP 763588U JP 763588 U JP763588 U JP 763588U JP H069489 Y2 JPH069489 Y2 JP H069489Y2
Authority
JP
Japan
Prior art keywords
mounting table
boat
wafer support
wafer
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP763588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01113330U (en]
Inventor
伸良 佐藤
Original Assignee
川崎製鉄株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 川崎製鉄株式会社 filed Critical 川崎製鉄株式会社
Priority to JP763588U priority Critical patent/JPH069489Y2/ja
Publication of JPH01113330U publication Critical patent/JPH01113330U/ja
Application granted granted Critical
Publication of JPH069489Y2 publication Critical patent/JPH069489Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP763588U 1988-01-26 1988-01-26 ウエハ支持具の載置台 Expired - Lifetime JPH069489Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP763588U JPH069489Y2 (ja) 1988-01-26 1988-01-26 ウエハ支持具の載置台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP763588U JPH069489Y2 (ja) 1988-01-26 1988-01-26 ウエハ支持具の載置台

Publications (2)

Publication Number Publication Date
JPH01113330U JPH01113330U (en]) 1989-07-31
JPH069489Y2 true JPH069489Y2 (ja) 1994-03-09

Family

ID=31212811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP763588U Expired - Lifetime JPH069489Y2 (ja) 1988-01-26 1988-01-26 ウエハ支持具の載置台

Country Status (1)

Country Link
JP (1) JPH069489Y2 (en])

Also Published As

Publication number Publication date
JPH01113330U (en]) 1989-07-31

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